中文
Vacuum applications in the semiconductor industry
Jiangsu Quantianxia Intelligent Equipment Co., Ltd. is a high-tech company with R&D and production of high-end special pumps and pump application systems as its main business. We mainly serve the fields of pharmaceutical and chemical industry, semiconductor, new energy battery, photovoltaic coating, etc. Our company specializes in the production of dry screw vacuum pump, rotary vane vacuum pump, water ring vacuum pump, Roots vacuum pump and other vacuum equipment, and can also customize personalized Roots vacuum units and vacuum system application solutions with different performance requirements for you.
We have professional technology and unremitting efforts to provide you with perfect vacuum engineering design, consulting, maintenance, repair, modification and other technical support and services, my company will bring you the best quality products and the fastest service. If you want to know more about vacuum pumps or want to buy such products, welcome to inquire! Contact: 0755-28997459-8042/19168500859 (wechat number)
●In the field of semiconductor applications involved are: electronic acceleration, photoelectric devices, electronic materials, ray tubes, crystal vibration, relays, lasers, ion implantation equipment, ion etching machine, chemical vapor deposition equipment, physical vapor deposition equipment, molecular beam epitaxy equipment, integrated circuit packaging, other semiconductor application equipment, such as vacuum pumps.
●According to the process requirements, the structure and vacuum requirements of the vacuum pump are different, common: evaporation, sputtering, PECVD, vacuum dry etching, vacuum adsorption, test equipment, automatic vacuum cleaning and other processes
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Physical vapor deposition
The process is mainly divided into three types of vacuum evaporation coating, vacuum sputtering coating and vacuum ion coating, through physical methods to deposit the substrate surface of the material source to form a film with special functions.
Applicable products: Roots vacuum unit, dry screw vacuum pump, rotary vane vacuum pump, molecular pump and other pumps.
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Ion implantation
This process is a material surface modification technology, the atoms of a certain element are ionized into ions, and finally stay in the material, so that a series of physical and chemical interactions occur, so as to obtain excellent surface properties.
Applicable products: Roots vacuum unit, dry screw vacuum pump, rotary vane vacuum pump, molecular pump and other pumps.
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Wafer cleaning
Wafer cleaning process is one of the most important process links in IC manufacturing, its main role is to remove impurities and attachments on the wafer, to ensure the purity and yield of the wafer.
Applicable products: Roots vacuum unit, dry screw vacuum pump, rotary vane vacuum pump, molecular pump and other pumps.
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Chemical vapor deposition
The process is mainly the use of one or several gaseous compounds or elements containing film elements, chemical reaction on the surface of the substrate to produce a film method.
Applicable products: Roots vacuum unit, dry screw vacuum pump, rotary vane vacuum pump, scroll pump, molecular pump and other pumps.
